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Solution

Designed for Detection of Sapphire, wafer, etc. It is driven by Akribis’ highperformance ironless linear motors;

 

Features

* XY axis adopts cross-roller guide, hollow structure and build-in grating system. Its resolution can achieve 50nm, repeatability can be ±0.75um and accuracy can be 2um

* Effective stroke is 200*200mm and maximum speed can achieve 200mm/s

* Effective stroke is 200*200mm and maximum speed can achieve 200mm/s

* Customization is available

 

 

Specifications

  Unit X Axis Y Axis
Stroke  mm 200 200
Resolution  nm 50 50
Accuracy  μm ±2 ±2
Repeatability  μm ±0.75  ±0.75
Flatness  μm ±3.5
Straightness  μm ±3.5
Maximum Speed  mm/s 200
Recommended Payload Kg < 4
Central hole size mm 288 x 288
Orthogonality arc sec 10

 

Drawings