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Solution

Our APS high precise stage is specially deigned for photonics applications, it is driven by Akribis'  high performance ironless linear motors

 

Features

* Combined with professional ACS controller that allows static jitter to be ≤±25nm and makes it much more stable

* Using a 1nm resolution absolute encoder allows its repeatability to be ≤±100nm and accuracy (after error compensation) to be ≤±350nm

* High speed & High acceleration. Every axis of APS stage can achieve ≥350mm/s speed and ≥1g acceleration, which make it much more efficient for tasks, such as spiral search applications

  

 

Specifications

  Unit Lower Axis Upper Axis Z Axis
Stroke mm 110 110 60
Accuracy (Error compensation) nm ±200 ±300 ±300
Resolution nm 1 1 1
Repeatability (Bidirectional) nm ±100 ±100 ±100
Straightness μm ±1.5 ±1.5 ±1.5
Flatness μm ±1.5 ±1.5 ±1.5
Pitch arc sec 10 15 15
Roll arc sec N/A N/A N/A
Yaw arc sec 10 15 15
Orthogonality arc sec 10 10 10
Maximum Speed (No Load) mm/s 350s 350 350
Maximum Acceleration (No Load)span> G 1 1 1
Maximum Force (Continuous) N 57 26.4 26.4

Noted:

① Maximum speed and acceleration of only XY stage is achieved by no load condition. No Z axis mounted.

② Maximum speed and acceleration of only Z stage is achieved by no load condition.

* All specs based on mounting on 5 um flatness granite base.

* For the repeatability of the specifications, temperature to be controlled within ±0.1°c.

 

Drawings