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        AFXS Stage

        Designed for Detection of Sapphire, wafer, etc. It is driven by Akribis’ highperformance ironless linear motors;

         

        Features

        * XY axis adopts cross-roller guide, hollow structure and build-in grating system. Its resolution can achieve 50nm, repeatability can be ±0.75um and accuracy can be 2um

        * Effective stroke is 200*200mm and maximum speed can achieve 200mm/s

        * Effective stroke is 200*200mm and maximum speed can achieve 200mm/s

        * Customization is available

         

         

        Specifications

          Unit X Axis Y Axis
        Stroke  mm 200 200
        Resolution  nm 50 50
        Accuracy  μm ±2 ±2
        Repeatability  μm ±0.75  ±0.75
        Flatness  μm ±3.5
        Straightness  μm ±3.5
        Maximum Speed  mm/s 200
        Recommended Payload Kg < 4
        Central hole size mm 288 x 288
        Orthogonality arc sec 10

         

        Drawings