Motor Configuration
|
MODEL |
Axis |
Motor |
Effective Stroke |
Moving Mass |
Total Mass |
Sensor Position |
Hard Stopper Position |
|
(mm) |
(Kg) |
(Kg) |
(mm) |
(mm) |
|
DGL200 |
Top |
AUM4-S2 |
300 |
3.1 |
29 |
304 |
320 |
|
AUM4-S3 |
300 |
3.4 |
29 |
304 |
320 |
|
Bottom |
AUM4-S3 |
300 |
24.9 |
103 |
304 |
320 |
|
AUM4-S4 |
300 |
26.1 |
103 |
304 |
320 |
Note: That granite mass is approx.240Kg.
Performance Parameter
|
Specification Parameter |
Unit |
DGCR 300 |
DGCRS 300 |
|
1Straightness |
μm |
±3μm/25mm, NTE±10μm/510mm |
±3μm/25mm，NTE±10μm/610mm |
|
±3μm/25mm, NTE±10μm/300mm |
±3μm/25mm, NTE±10μm/300mm |
|
1Flatness |
±3μm/25mm |
±3μm/25mm，NTE±10μ |
|
NTE±10μm/300mm |
NTE±10μm/300mm |
|
Repeatability (1μm resolution) |
±3 (40μm scale pitch) |
±3 (40μm scale pitch) |
|
Repeatability (0.5μm resolution) |
±1.5 (20μm scale pitch) |
±1.5 (20μm scale pitch) |
|
Repeatability (0.1μm resolution) |
±1 (20μm scale pitch) |
±1 (20μm scale pitch) |
|
Repeatability (Analogue) |
±5 counts |
±5 counts |
|
X-Y Orthogonality |
Arc-sec |
10 |
10 |
Note: All measurement taken when module is mounted on a 5 μm flat granite table.
