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Your Present Location:Home >> Products >> Linear Motor Stages >> DGL XY
Products
  • Name: DGL XY
  • Explain: Dual Guide Stage with Clean Room Cover
  • DGL XY is built by Akribis' standard CR cover DGL series moudle.

 

Design Feature

A. Direct-drive ironless linear motor positioning system
B. Precise motion and homing
C.  Clean Room Cover
 
DGL XY Dual Guide Stage with clean room cover is built by Akribis' standard CR cover DGL series moudle, with great siffness and positioning accuracy. It is suitable for clean-room surrounding.

 

Motor Configuration

MODEL Axis Motor Effective Stroke (mm) Moving Mass (Kg) Total Mass (Kg) Sensor Position (mm) Hard Stopper Position (mm)
DGL200 Top AUM4-S2 300 3.1 29 304 320
AUM4-S3 300 3.4 29 304 320
Bottom AUM4-S3 300 24.9 103 304 320
AUM4-S4 300 26.1 103 304 320

Note: That granite mass is approx.240Kg. 

 

Performance Parameter

Specification Parameter Unit DGCR 300 DGCRS 300
1Straightness μm ±3μm/25mm, NTE±10μm/510mm ±3μm/25mm,NTE±10μm/610mm
±3μm/25mm, NTE±10μm/300mm ±3μm/25mm, NTE±10μm/300mm
1Flatness ±3μm/25mm ±3μm/25mm,NTE±10μ
NTE±10μm/300mm NTE±10μm/300mm
Repeatability (1μm resolution) ±3μm (40μm scale pitch) ±3μm (40μm scale pitch)
Repeatability (0.5μm resolution) ±1.5μm (20μm scale pitch) ±1.5μm (20μm scale pitch)
Repeatability (0.1μm resolution) ±1μm (20μm scale pitch) ±1μm (20μm scale pitch)
Repeatability (Analogue) ±5 counts ±5 counts
X-Y Orthogonality Arc-sec 10 10

Note: All measurement taken when module is mounted on a 5 micron flat granite table.