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        • Name: DGL XY
        • Version: Linear S-001-2
        • AddTime: 2018-09-30
        • Views : 395

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        Design Feature

        A. Direct-drive ironless linear motor positioning system
        B. Precise motion and homing
        C.  Clean Room Cover
         
        DGL XY Dual Guide Stage with clean room cover is built by Akribis' standard CR cover DGL series moudle, with great siffness and positioning accuracy. It is suitable for clean-room surrounding.

         

        Motor Configuration

        MODEL Axis Motor Effective Stroke Moving Mass Total Mass Sensor Position Hard Stopper Position
        (mm) (Kg) (Kg) (mm) (mm)
        DGL200 Top AUM4-S2 300 3.1 29 304 320
        AUM4-S3 300 3.4 29 304 320
        Bottom AUM4-S3 300 24.9 103 304 320
        AUM4-S4 300 26.1 103 304 320

        Note: That granite mass is approx.240Kg. 

         

        Performance Parameter

        Specification Parameter Unit DGCR 300 DGCRS 300
        1Straightness μm ±3μm/25mm, NTE±10μm/510mm ±3μm/25mm,NTE±10μm/610mm
        ±3μm/25mm, NTE±10μm/300mm ±3μm/25mm, NTE±10μm/300mm
        1Flatness ±3μm/25mm ±3μm/25mm,NTE±10μ
        NTE±10μm/300mm NTE±10μm/300mm
        Repeatability (1μm resolution) ±3  (40μm scale pitch) ±3  (40μm scale pitch)
        Repeatability (0.5μm resolution) ±1.5  (20μm scale pitch) ±1.5  (20μm scale pitch)
        Repeatability (0.1μm resolution) ±1  (20μm scale pitch) ±1  (20μm scale pitch)
        Repeatability (Analogue) ±5 counts ±5 counts
        X-Y Orthogonality Arc-sec 10 10

         

        Note: All measurement taken when module is mounted on a 5 μm flat granite table.

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